Thermal flow meters are precision instruments that measure the mass flow of gases using the principle of heat transfer. They work by heating a sensor element and monitoring how much heat is carried away by the gas as it flows past. The rate of heat loss is directly proportional to the mass flow rate, allowing accurate measurement without the need for pressure or temperature compensation.
These meters are especially suited for low flow rates and clean gases, making them widely used in industries such as semiconductor manufacturing, chemical processing, environmental monitoring, and energy management.